Application of peristaltic pumps in chip coating, development and etching
Chip production is a very complex process of turning sand into gold – from sand to wafer to chip.
The wafers are first extracted layer by layer from the sand, and the process of pulling and cutting is involved in the middle. Then make circuits and electronic components on the finished wafer, which is also the most critical link in chip manufacturing, mainly including coating, lithography, development, etching, ion implantation and other processes, and then through hundreds of complex processes and months of processing, in order to integrate kilometers of wires and hundreds of millions of transistor devices in a space the size of a fingernail. The packaging and testing business belongs to the back-end industry of the integrated circuit industry chain.
Peristaltic pumps offer a sophisticated portfolio of critical process chemicals for chip coating, development and etching, which are critical process steps in chip manufacturing.
Application value
· Pumping medium: acidic reagent or alkaline reagent
· Flow rate: tens of milliliters/min
· Flow accuracy: ±2%
· Pumping volume range: tens of milliliters to several hundred milliliters (depending on coating thickness)
· The coating uniformity is good and the film layer is dense
· Process flow: peristaltic pump pumps acid-base solution to adjust acid-base balance, and then pumps the adjusted reagent to the nozzle, and the reagent is atomized and evenly sprayed to the chip surface for coating, and the thickness of the coating determines the amount of liquid ejected
Recommended model
Dispensing type series with inlet hose
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